Control Etch Rates on PZT for MEMS Fabrication

Control Etch Rates on PZT for MEMS Fabrication

Researchers at the University of Maryland determined that MicroBlasting made the process of etching PZT controllable, mass-producible, and efficient. Combining Comco technology and dry film photoresist masking, they were able to produce channels to a specified depth. This paper published in the Journal of Micromechanics and Microengineering compares other processes and provides a detailed outcome.