These are delicate tasks! See how the Hunley project and the Natural History Museum of Los Angeles use MicroBlasting to reveal a part of the past.
Researchers at the University of Maryland determined that MicroBlasting made the process of etching PZT controllable, mass-producible, and efficient. Combining Comco technology and dry film photoresist masking, they were able to produce channels to a specified depth. This paper published in the Journal of Micromechanics and Microengineering compares other processes and provides a detailed outcome.